Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9401297 | Electrostatic chuck mechanism and charged particle beam apparatus | Seiichiro Kanno, Masaya Yasukochi, Masakazu Takahashi, Naoya Ishigaki, Go Miya | 2016-07-26 |
| 9245710 | Charged particle beam device | Kazuhiro Gunji, Yuta Asaga | 2016-01-26 |