Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9401297 | Electrostatic chuck mechanism and charged particle beam apparatus | Yasushi Ebizuka, Seiichiro Kanno, Masakazu Takahashi, Naoya Ishigaki, Go Miya | 2016-07-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9401297 | Electrostatic chuck mechanism and charged particle beam apparatus | Yasushi Ebizuka, Seiichiro Kanno, Masakazu Takahashi, Naoya Ishigaki, Go Miya | 2016-07-26 |