Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9502208 | Charged particle beam apparatus, stage controlling method, and stage system | Masaki Mizuochi, Akira Nishioka, Hironori Ogawa | 2016-11-22 |
| 9368320 | Stage apparatus, and charged particle beam apparatus using same | Akira Nishioka, Masaki Mizuochi, Hiroshi Tsuji | 2016-06-14 |