Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9502208 | Charged particle beam apparatus, stage controlling method, and stage system | Masaki Mizuochi, Akira Nishioka, Shuichi Nakagawa | 2016-11-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9502208 | Charged particle beam apparatus, stage controlling method, and stage system | Masaki Mizuochi, Akira Nishioka, Shuichi Nakagawa | 2016-11-22 |