Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9464936 | Plasma processing apparatus and analyzing apparatus | Ryoji Asakura, Akira Kagoshima, Kenji Tamaki | 2016-10-11 |
| 9443704 | Data analysis method for plasma processing apparatus, plasma processing method and plasma processing apparatus | Ryoji Asakura, Kenji Tamaki, Akira Kagoshima | 2016-09-13 |
| 9324588 | Data analysis method for plasma processing apparatus, plasma processing method and plasma processing apparatus | Ryoji Asakura, Kenji Tamaki, Akira Kagoshima | 2016-04-26 |
| 9268725 | Data transferring apparatus and data transferring method | Chuma Nagao, Akiyoshi Momoi, Takeshi Hiraoka | 2016-02-23 |