Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9464936 | Plasma processing apparatus and analyzing apparatus | Ryoji Asakura, Daisuke Shiraishi, Kenji Tamaki | 2016-10-11 |
| 9443704 | Data analysis method for plasma processing apparatus, plasma processing method and plasma processing apparatus | Ryoji Asakura, Kenji Tamaki, Daisuke Shiraishi | 2016-09-13 |
| 9324588 | Data analysis method for plasma processing apparatus, plasma processing method and plasma processing apparatus | Ryoji Asakura, Kenji Tamaki, Daisuke Shiraishi | 2016-04-26 |