Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9524973 | Shallow trench air gaps and their formation | Ryo Nakamura | 2016-12-20 |
| 9389781 | Information processing apparatus, method for controlling same, and recording medium | — | 2016-07-12 |
| 9376581 | Photo-curable composition for imprints, pattern forming method and pattern | Hirotaka KITAGAWA | 2016-06-28 |
| 9274421 | Salt and photoresist composition comprising the same | Yukako Anryu, Koji Ichikawa | 2016-03-01 |
| 9268219 | Photoresist composition and resist pattern-forming method | Hiromu MIYATA, Hiromitsu Nakashima | 2016-02-23 |