Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9458012 | Method for shielding MEMS structures during front side wafer dicing | Alan J. Magnus | 2016-10-04 |
| 9359192 | Microelectromechanical systems (MEMS) devices with control circuits and methods of fabrication | Philip H. Bowles, Mamur Chowdhury | 2016-06-07 |