Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9478384 | Electrode for producing a plasma, plasma chamber having said electrode, and method for analyzing or processing a layer or the plasma in situ | Stefan Muthmann, Aad Gordijn, Markus Huelsbeck, Dzmitry Hrunski | 2016-10-25 |
| 9234281 | Method for producing silicon layers | Stephan Wieber, Matthias Patz, Torsten Bronger, Michael Cölle | 2016-01-12 |