Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9478384 | Electrode for producing a plasma, plasma chamber having said electrode, and method for analyzing or processing a layer or the plasma in situ | Stefan Muthmann, Aad Gordijn, Reinhard Carius, Markus Huelsbeck | 2016-10-25 |