Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9513569 | Optical collector for collecting extreme ultraviolet radiation, method for operating such an optical collector, and EUV source with such a collector | Franz Dieterich, Andrea Giovannini, Vipluv Aga | 2016-12-06 |
| 9307625 | Droplet dispensing device and light source comprising such a droplet dispensing device | Bob Rollinger, Andrea Giovannini, Ian Henderson | 2016-04-05 |