Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9513569 | Optical collector for collecting extreme ultraviolet radiation, method for operating such an optical collector, and EUV source with such a collector | Reza Abhari, Andrea Giovannini, Vipluv Aga | 2016-12-06 |