Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9340878 | TPIR apparatus for monitoring tungsten hexafluoride processing to detect gas phase nucleation, and method and system utilizing same | Jose I. Arno, Joseph R. Despres, Steven M. Lurcott, Thomas H. Baum, Peng Zou | 2016-05-17 |