Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9455147 | Boron ion implantation using alternative fluorinated boron precursors, and formation of large boron hydrides for implantation | W. Karl Olander, Robert Kaim | 2016-09-27 |
| 9340878 | TPIR apparatus for monitoring tungsten hexafluoride processing to detect gas phase nucleation, and method and system utilizing same | Joseph R. Despres, Shkelqim Letaj, Steven M. Lurcott, Thomas H. Baum, Peng Zou | 2016-05-17 |