Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9406480 | Testing apparatus using charged particles and device manufacturing method using the testing apparatus | Nobuharu Noji, Tohru Satake, Hirosi Sobukawa, Masahiro Hatakeyama, Shoji Yoshikawa +7 more | 2016-08-02 |
| 9401293 | Polishing apparatus and polishing method | Itsuki Kobata, Yoichi Kobayashi, Katsutoshi Ono, Masaki Kinoshita | 2016-07-26 |
| 9368314 | Inspection system by charged particle beam and method of manufacturing devices using the system | Mamoru Nakasuji, Nobuharu Noji, Tohru Satake, Masahiro Hatakeyama, Hirosi Sobukawa +9 more | 2016-06-14 |
| 9266214 | Polishing method and polishing apparatus | — | 2016-02-23 |