Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9406480 | Testing apparatus using charged particles and device manufacturing method using the testing apparatus | Tohru Satake, Hirosi Sobukawa, Toshifumi Kimba, Masahiro Hatakeyama, Shoji Yoshikawa +7 more | 2016-08-02 |
| 9390886 | Electro-optical inspection apparatus using electron beam | Mamoru Nakasuji, Tohru Satake, Hirosi Sobukawa | 2016-07-12 |
| 9368314 | Inspection system by charged particle beam and method of manufacturing devices using the system | Mamoru Nakasuji, Tohru Satake, Masahiro Hatakeyama, Toshifumi Kimba, Hirosi Sobukawa +9 more | 2016-06-14 |