Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9390958 | Transfer unit including suction openings configured to receive suction pads or seal members therein | Kenta Onishi, Shigefumi Okada, Hiroyuki Urabe, Yuki Watanabe | 2016-07-12 |
| 9269624 | Wafer processing method | Masaru Nakamura | 2016-02-23 |