Showing 1–10 of 10 inventors
| Rank | Inventor | Primary Company | Patents |
|---|---|---|---|
| 1 | Wenling Wang | Tokyo Electron Limited | 3 |
| 1 | Manabu Honma | Tokyo Electron Limited | 3 |
| 3 | Koji Yoshii | Tokyo Electron Limited | 2 |
| 3 | Mitsuru Obara | Konica Minolta | 2 |
| 3 | Masami Oikawa | Tokyo Electron Limited | 2 |
| #6 | Kohichi Orito | Tokyo Electron Limited | 1 |
| #6 | Kenichi Yamaga | Tokyo Electron Limited | 1 |
| #6 | Satoru Koike | Tokyo Electron Limited | 1 |
| #6 | Katsuya Toba | Tokyo Electron Limited | 1 |
| #6 | Tomohiro Shiobara | Tokyo Electron Limited | 1 |