Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9416448 | Film deposition apparatus, substrate processing apparatus, film deposition method, and computer-readable storage medium for film deposition method | Hitoshi Kato, Kohichi Orito | 2016-08-16 |
| 9297072 | Film deposition apparatus | Hitoshi Kato | 2016-03-29 |
| 9267204 | Film deposition apparatus, substrate processing apparatus, film deposition method, and storage medium | — | 2016-02-23 |