Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9529250 | EUV mask with ITO absorber to suppress out of band radiation | Shinn-Sheng Yu, Jeng-Horng Chen, Anthony Yen | 2016-12-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9529250 | EUV mask with ITO absorber to suppress out of band radiation | Shinn-Sheng Yu, Jeng-Horng Chen, Anthony Yen | 2016-12-27 |