Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9488914 | Fluorine-containing sulfonic acid salt, fluorine-containing sulfonic acid salt resin, resist composition, and pattern forming method using same | Kazunori Mori, Yuji Hagiwara, Fumihiro Amemiya, Masaki Fujiwara | 2016-11-08 |
| 9244345 | Non-ionic photo-acid generating polymers for resist applications | Takehisa Ishimaru, Daniel P. Sanders, Ratnam Sooriyakumaran, Hoa D. Truong, Rudy J. Wojtecki +1 more | 2016-01-26 |