Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9488914 | Fluorine-containing sulfonic acid salt, fluorine-containing sulfonic acid salt resin, resist composition, and pattern forming method using same | Kazunori Mori, Satoru Narizuka, Yuji Hagiwara, Masaki Fujiwara | 2016-11-08 |