Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9442383 | EUV-mirror arrangement, optical system with EUV-mirror arrangement and associated operating method | Udo Dinger, Muharrem Bayraktar, Oliver Dier | 2016-09-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9442383 | EUV-mirror arrangement, optical system with EUV-mirror arrangement and associated operating method | Udo Dinger, Muharrem Bayraktar, Oliver Dier | 2016-09-13 |