Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9459538 | Lithography apparatus and method for producing a mirror arrangement | Wilfried Clauss, Hin Yiu Anthony Chung | 2016-10-04 |
| 9250417 | Optical arrangement in a microlithographic projection exposure apparatus | Stefan Hembacher, Jens Kugler | 2016-02-02 |