Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9472384 | Electronic device manufacturing method and sputtering method | Kazuaki Matsuo | 2016-10-18 |
| 9322092 | Sputtering apparatus and method of manufacturing electronic device | Kimiko Mashimo, Shinya Nagasawa | 2016-04-26 |