Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9355822 | Plasma processing apparatus | Toshifumi Tachikawa, Koichi Nagami, Tatsuya Ikenari, Daisuke Maehara | 2016-05-31 |
| 9244803 | Failure predictive system, and failure predictive apparatus | Koji Adachi | 2016-01-26 |