Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9512863 | Silicon alignment pins: an easy way to realize a wafer-to-wafer alignment | Cecile D. Jung-Kubiak, Bertrand Thomas, Robert H. Lin, Alejandro Peralta, John J. Gill +6 more | 2016-12-06 |
| 9461352 | Multi-step deep reactive ion etching fabrication process for silicon-based terahertz components | Cecile D. Jung-Kubiak, Goutam Chattopadhyay, Jose Vicente Siles Perez, Robert H. Lin, Imran Mehdi +3 more | 2016-10-04 |
| 9366697 | Micromachined on-wafer probes and related method | Robert M. Weikle, II, Arthur Weston Lichtenberger, Nicolas Scott Barker, Haiyong Xu, Lihan Chen | 2016-06-14 |