Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9512863 | Silicon alignment pins: an easy way to realize a wafer-to-wafer alignment | Cecile D. Jung-Kubiak, Theodore Reck, Bertrand Thomas, Robert H. Lin, John J. Gill +6 more | 2016-12-06 |
| 9461352 | Multi-step deep reactive ion etching fabrication process for silicon-based terahertz components | Cecile D. Jung-Kubiak, Theodore Reck, Goutam Chattopadhyay, Jose Vicente Siles Perez, Robert H. Lin +3 more | 2016-10-04 |