Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9249013 | Silicon hardmask layer for directed self-assembly | Yubao Wang, Mary Ann Hockey, Vandana Krishnamurthy, Robert Christian Cox | 2016-02-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9249013 | Silicon hardmask layer for directed self-assembly | Yubao Wang, Mary Ann Hockey, Vandana Krishnamurthy, Robert Christian Cox | 2016-02-02 |