Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9497840 | System and method for creating and utilizing dual laser curtains from a single laser in an LPP EUV light source | — | 2016-11-15 |
| 9331117 | Sensor and lithographic apparatus | Stoyan Nihtianov, Haico Victor Kok | 2016-05-03 |
| 9241395 | System and method for controlling droplet timing in an LPP EUV light source | Vahan Senekerimyan | 2016-01-19 |