Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9423688 | Lithographic method to apply a pattern to a substrate and lithographic apparatus | — | 2016-08-23 |
| 9331117 | Sensor and lithographic apparatus | Stoyan Nihtianov, Martijn Gerard Dominique Wehrens | 2016-05-03 |