Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9478414 | Method for hydrophobization of surface of silicon-containing film by ALD | Akiko Kobayashi, Akinori Nakano, Dai Ishikawa | 2016-10-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9478414 | Method for hydrophobization of surface of silicon-containing film by ALD | Akiko Kobayashi, Akinori Nakano, Dai Ishikawa | 2016-10-25 |