Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9478414 | Method for hydrophobization of surface of silicon-containing film by ALD | Akiko Kobayashi, Akinori Nakano, Kiyohiro Matsushita | 2016-10-25 |
| 9353441 | Heating/cooling pedestal for semiconductor-processing apparatus | Hsiao Pei Chung, Hirofumi Arai | 2016-05-31 |
| 9309119 | Producing method of metal fine particles or metal oxide fine particles, metal fine particles or metal oxide fine particles, and metal-containing paste, and metal film or metal oxide film | Yamato Hayashi, Yoshihiro Sekiguchi, Hirotsugu TAKIZAWA, Tomiya Abe | 2016-04-12 |