Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9453036 | Group 11 mono-metallic precursor compounds and use thereof in metal deposition | Jason P. COYLE, Timothy J. Clark, Jeffrey J.M. Hastie | 2016-09-27 |
| 9273391 | ALD of zirconium-containing films using cyclopentadienyl compounds | Yamile A.M. Wasslen, Antti Rahtu | 2016-03-01 |