Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9273391 | ALD of zirconium-containing films using cyclopentadienyl compounds | Sean T. Barry, Yamile A.M. Wasslen | 2016-03-01 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9273391 | ALD of zirconium-containing films using cyclopentadienyl compounds | Sean T. Barry, Yamile A.M. Wasslen | 2016-03-01 |