Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9243330 | Apparatus and method for high-throughput atomic layer deposition | Ernst Hendrik August Granneman | 2016-01-26 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9243330 | Apparatus and method for high-throughput atomic layer deposition | Ernst Hendrik August Granneman | 2016-01-26 |