Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9478449 | Floating substrate monitoring and control device, and method for the same | Pascal Vermont, Wilhelmus Gerardus Van Velzen, Vladimir Kuznetsov, Gonzalo Felipe Ramirez Troxler | 2016-10-25 |
| 9243330 | Apparatus and method for high-throughput atomic layer deposition | Sebastiaan E. van Nooten | 2016-01-26 |
| 9238867 | Apparatus and method for high-throughput atomic layer deposition | Herbert Terhorst | 2016-01-19 |