Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9472392 | Step coverage dielectric | Shalina Sudheeran, Loke Yuen Wong, Arvind Sundarrajan | 2016-10-18 |
| 9362111 | Hermetic CVD-cap with improved step coverage in high aspect ratio structures | Shalina Sudheeran, Arvind Sundarrajan, Bharat Bhushan | 2016-06-07 |