Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9472392 | Step coverage dielectric | Zongbin Wang, Shalina Sudheeran, Loke Yuen Wong | 2016-10-18 |
| 9362111 | Hermetic CVD-cap with improved step coverage in high aspect ratio structures | Zongbin Wang, Shalina Sudheeran, Bharat Bhushan | 2016-06-07 |
| 9305838 | BEOL interconnect with carbon nanotubes | Pravin K. Narwankar, JOE GRIFFITH CRUZ, Murali Narasimhan, Subbalakshmi Sreekala, Victor L. Pushparaj | 2016-04-05 |