Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9305796 | Methods for etching silicon using hydrogen radicals in a hot wire chemical vapor deposition chamber | Srinivas D. Nemani | 2016-04-05 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9305796 | Methods for etching silicon using hydrogen radicals in a hot wire chemical vapor deposition chamber | Srinivas D. Nemani | 2016-04-05 |