Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9488315 | Gas distribution apparatus for directional and proportional delivery of process gas to a process chamber | Saravjeet Singh | 2016-11-08 |
| 9305810 | Method and apparatus for fast gas exchange, fast gas switching, and programmable gas delivery | Saravjeet Singh | 2016-04-05 |