Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9405185 | Shape metrology for photomasks | Clemens Utzny, Christian Buergel, Albrecht Ullrich | 2016-08-02 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9405185 | Shape metrology for photomasks | Clemens Utzny, Christian Buergel, Albrecht Ullrich | 2016-08-02 |