Issued Patents 2011
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7978337 | Interferometer utilizing polarization scanning | Peter De Groot | 2011-07-12 |
| 7978338 | Compound reference interferometer | Peter De Groot, Mark Davidson, Jan Liesener, Leslie L. Deck | 2011-07-12 |
| 7952724 | Interferometer with multiple modes of operation for determining characteristics of an object surface | Peter De Groot | 2011-05-31 |
| 7948636 | Interferometer and method for measuring characteristics of optically unresolved surface features | Peter De Groot, Michael J. Darwin, Robert Stoner, Gregg M. Gallatin | 2011-05-24 |
| 7889355 | Interferometry for lateral metrology | Robert Stoner, Peter De Groot | 2011-02-15 |
| 7884947 | Interferometry for determining characteristics of an object surface, with spatially coherent illumination | Peter De Groot | 2011-02-08 |