Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7948636 | Interferometer and method for measuring characteristics of optically unresolved surface features | Peter De Groot, Michael J. Darwin, Gregg M. Gallatin, Xavier Colonna De Lega | 2011-05-24 |
| 7889355 | Interferometry for lateral metrology | Xavier Colonna De Lega, Peter De Groot | 2011-02-15 |