Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8039409 | TiO2-containing silica glass for optical member for EUV lithography | Akio Koike, Mitsuhiro Kawata | 2011-10-18 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8039409 | TiO2-containing silica glass for optical member for EUV lithography | Akio Koike, Mitsuhiro Kawata | 2011-10-18 |