Issued Patents 2011
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8039409 | TiO2-containing silica glass for optical member for EUV lithography | Kenta Saitou, Mitsuhiro Kawata | 2011-10-18 |
| 8034731 | TIO2-containing silica glass and optical member for lithography using the same | Yasutomi Iwahashi, Shinya Kikugawa | 2011-10-11 |
| 8012653 | Substrate for EUV mask blanks | Ken Ebihara | 2011-09-06 |
| 7998892 | TiO2-containing silica glass and optical member for lithography using the same | Yasutomi Iwahashi, Shinya Kikugawa | 2011-08-16 |
| 7989378 | TiO2-containing silica glass | Yasutomi Iwahashi, Shinya Kikugawa | 2011-08-02 |