Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7959819 | Method and apparatus for reducing aspect ratio dependent etching in time division multiplexed etch processes | David Johnson, Russell Westerman | 2011-06-14 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7959819 | Method and apparatus for reducing aspect ratio dependent etching in time division multiplexed etch processes | David Johnson, Russell Westerman | 2011-06-14 |