Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7959819 | Method and apparatus for reducing aspect ratio dependent etching in time division multiplexed etch processes | Shouliang Lai, David Johnson | 2011-06-14 |
| 7867403 | Temperature control method for photolithographic substrate | Jason Plumhoff, Larry Ryan, John Nolan, David Johnson | 2011-01-11 |