Issued Patents 2011
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8084186 | Hardmask process for forming a reverse tone image using polysilazane | David Abdallah, Ralph R. Dammel, Yusuke Takano, Jin Li | 2011-12-27 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8084186 | Hardmask process for forming a reverse tone image using polysilazane | David Abdallah, Ralph R. Dammel, Yusuke Takano, Jin Li | 2011-12-27 |