Issued Patents 2011
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8084186 | Hardmask process for forming a reverse tone image using polysilazane | David Abdallah, Yusuke Takano, Jin Li, Kazunori Kurosawa | 2011-12-27 |
| 7923200 | Composition for coating over a photoresist pattern comprising a lactam | Muthiah Thiyagarajan, Yi Cao, SungEun Hong, Wenbing Kang, Clement Anyadiegwu | 2011-04-12 |